“AQURUS®,“ Silicon waste water recovery system, recovers silicon particles and water at once from waste water, containing silicon particles, generated in the polishing process of semiconductor, solar battery, etc.
Furthermore, it is possible to recover waste water that includes particles (GaAs, glass waste) generated in the polishing process of compound semiconductor, flat-panel display (FPD), and glass substrate.
Particles after recovery (silicon, GaAs, glass waste) can be used as valuable resources.
Basic structure of AQURUS® is as follows.