Anti-static equipment for ultrapure water, Super Bubbler WAC

Super Bubbler WAC is used to prevent various electrostatic damage in the dicing process of semiconductor manufacturing or the high pressure cleaning process of flat panel display (FPD) manufacturing. This equipment performs its function by quantitatively dissolving CO2 gas into the inlet ultrapure water and precisely controlling resistivity of outlet ultrapure water. This equipment is more compact and weighs less than the conventional type.
We have two types for purpose of usage; Rack type can be built in the wet station, and Cabinet type has a capacity of two CO2 gas cylinders in its container.

This equipment does not discharge exhaust gas and waste water at all because of using direct injection method.

Features

• Ultrapure water flow rate: 200-1000ℓ/h, 200-2000ℓ/h, 300-3000ℓ/h
• Controllable range: 0.11-1.9MΩcm
• Control accuracy, Set resistivity: ±0.03MΩcm (at constant water flow and pressure rate)
• Power source: AC100-130V, AC220-240V, 50/60Hz, 1A
• Dimensions:
  • Rack type W480mm×D430mm×H250mm
  • Cabinet type W430mm×D430mm×H1350mm

Anti-static equipment for ultrapure water, Super Bubbler WAC