Functional Water Production System
"NOMUREXON®"is a system which produces function water by dissolving specific gas into ultra pure water.
Functional water is used as a substitute for chemicals in cleansing process of semiconductor, flat panel display (FPD), solar battery and MEMS.
Ozone water production system, NOMUREXON®O3
Ozone water production system,
- Promptly supplies ozone water by dissolving ozone gas.
- This system can also supply high concentrated ozone water more than 150ppm by using our unique technology.
- Ozone water concentration meter and environmental ozone gas detector are included as standard equipment.
- Flow rate：5-20ℓ/min
- Concentration：5-20ppm at 20℃(Standard type)
≧30ppm at 20℃(Highly-concentrated type)
Hydrogen water production system, NOMUREXON®H2
- Supplies clean hydrogen water by dissolving hydrogen gas.
- Hydrogen water concentration meter and environmental hydrogen gas detector are included as standard equipment.
- Flow rate：5-40ℓ/min
- Concentration：1.2-1.6ppm at 20℃
- Options：Alkali (ammonia water) Supply and Addition System
Anti-static system for ultra pure water, Super Bubbler WAC
Anti-static system /br>for ultra pure water,
Super Bubbler WAC
Super Bubbler WAC is used to prevent electrostatic damage in the dicing process of semiconductor industry or the high pressure rinsing process of flat panel display industry.
This system performs its function by quantitatively dissolving CO2 gas into the inlet ultra pure water and precisely controlling the electrical resistance of outlet water.
This system is more compact and weighs less than the conventional type.
We have two types for purpose of usage; Rack type can be built in the wet station, and Cabinet type has a capacity of two CO2 gas cylinders in its container.
This system does not discharge exhaust CO2 gas and waste water at all because of using direct injection system.
- Water flow rate：200-1000ℓ/min、200-2000ℓ/min、300-3000ℓ/min、
- Controllable range：0.11-1.9Mcm
- Control accurary Set resistivity：±0.03Mcm At constant water flow rate
- Power source：AC100-130V、AC220-240V
- Dimensions： Rack type 480*430*250mm, Cabinet type 430*430*1350mm