Ozone water production system, NOMUREXON®O3

"NOMUREXON®" is a system which produces functional water by dissolving specific gas into ultrapure water.
Functional water is used as a substitute for chemical cleaning in cleaning process of semiconductor, flat panel display (FPD), solar battery and MEMS (Micro Electro Mechanical Systems).

Features

  • This system supplies clean, immediately concentration-responsive ozone water by dissolving ozone gas.
  • This system can also supply high concentrated ozone water more than 150ppm by using our unique technology.
  • Ozone water densitometer and environmental ozone gas detector are included as standard equipment.

Specifications

  • Ozone water flow rate: 5-40ℓ/min
  • Ozone water concentration: 20-50ppm - 150mg/ℓ(25℃)

Ozone water production system, NOMUREXON®O3