The standard pure water system consists of (1) make-up system, which is a combination of an ion exchange equipment, a decarbonator system, a reverse osmosis membrane equipment, an ultraviolet oxidation unit, and a deoxidation system, and (2) ultrapure water system, which is a combination of an ultraviolet oxidation unit, an ion exchange equipment, and an ultrafiltration membrane equipment.
Furthermore, from the viewpoint of protecting resources and the environment, the reclamation system is sometimes added to recover used ultrapure water.
As for pure water system, Nomura Micro Science proposes optimal system which meets the required water quality by combining various equipment with our own technologies added.
Decarbonator in make-up system includes N-VOICER®, which can remove volatile organic compound (VOC) in water as well as carbon dioxide (CO2) at a time. There are various types of ion exchange systems, including Cation tower +N-VOICER®+Anion tower (2 Beds 3 Towers).
High efficiency RO system, HERO®, has a recovery rate more than 90% with an extremely high removal rate of ions and TOC (Total Organic Carbon). As UV oxidation unit, we have Twin TOC-UV whose decomposition efficiency of organic matter in water has been increased by two-stage treatment.
Regarding UV oxidation unit, it is possible to prevent excessive irradiation, stabilize water quality and decrease cost by divided lighting depending on TOC concentration in feed water.
As to deoxidation system, we have HE-VDG, High efficiency vacuum degasifier that can remove oxygen up to an extremely low level. We also use a high performance ultrafiltration (UF) membrane and ion exchange resin with extremely high purity.
As a reclamation system for used ultrapure water, we have a high efficiency organic waste water treatment system that utilizes ozone oxidation, Ozone Stager (O3 STAGER®). By installing this system, we can provide ultrapure water with high purity and stable quality.
In addition, non-chemical system which is combined RO unit and EDI contributes to low environmental impact and high safety by not using chemicals such as acids and alkalis, regenerant for ion exchange resins.
【Example of non-chemical system】